NAND string utilizing floating body memory cell

ABSTRACT

NAND string configurations and semiconductor memory arrays that include such NAND string configurations are provided. Methods of making semiconductor memory cells used in NAND string configurations are also described.

CROSS-REFERENCE

This application is a continuation of co-pending application Ser. No.17/219,564, filed Mar. 31, 2021, which is a continuation of applicationSer. No. 16/706,148, filed Dec. 6, 2019, now U.S. Pat. No. 10,991,697,issued on Apr. 27, 2021, which is a continuation of application Ser. No.16/132,675, filed Sep. 17, 2018, now U.S. Pat. No. 10,546,860, issued onJan. 28, 2020, which is a continuation of application Ser. No.15/628,931, filed Jun. 21, 2017, now U.S. Pat. No. 10,103,148, issued onOct. 16, 2018, which is a continuation of application Ser. No.15/161,493, filed May 23, 2016, now U.S. Pat. No. 9,704,578, issued onJul. 11, 2017, which is a division of application Ser. No. 14/267,112,filed May 1, 2014, now U.S. Pat. No. 9,368,625, issued on Jun. 14, 2016,which claims the benefit of U.S. Provisional Application No. 61/818,305,filed on May 1, 2013 and of U.S. Provisional Application No. 61/829,262,filed on May 31, 2013, all of which applications and patents are herebyincorporated herein, in their entireties, by reference thereto, and towhich applications we claim priority.

FIELD OF THE INVENTION

The present invention relates to semiconductor memory technology. Morespecifically, the invention relates to a semiconductor device utilizingan electrically floating body transistor.

BACKGROUND OF THE INVENTION

Semiconductor memory devices are used extensively to store data. Memorydevices can be characterized according to two general types: volatileand non-volatile. Volatile memory devices such as static random accessmemory (SRAM) and dynamic random access memory (DRAM) lose data that isstored therein when power is not continuously supplied thereto.

A DRAM cell without a capacitor has been investigated previously. Suchmemory eliminates the capacitor used in the conventional 1T/1C memorycell, and thus is easier to scale to smaller feature size. In addition,such memory allows for a smaller cell size compared to the conventional1T/1C memory cell. Chatterjee et al. have proposed a Taper Isolated DRAMcell concept in “Taper Isolated Dynamic Gain RAM Cell”, P. K. Chatterjeeet al., pp. 698-699, International Electron Devices Meeting, 1978(“Chatterjee-1”), “Circuit Optimization of the Taper Isolated DynamicGain RAM Cell for VLSI Memories”, P. K. Chatterjee et al., pp. 22-23,IEEE International Solid-State Circuits Conference, February 1979(“Chatterjee-2”), and “DRAM Design Using the Taper-Isolated Dynamic RAMCell”, J. E. Leiss et al., pp. 337-344, IEEE Journal of Solid-StateCircuits, vol. SC-17, no. 2, April 1982 (“Leiss”), which are herebyincorporated herein, in their entireties, by reference thereto. Theholes are stored in a local potential minimum, which looks like abowling alley, where a potential barrier for stored holes is provided.The channel region of the Taper Isolated DRAM cell contains a deepn-type implant and a shallow p-type implant. As shown in “A Survey ofHigh-Density Dynamic RAM Cell Concepts”, P. K. Chatterjee et al., pp.827-839, IEEE Transactions on Electron Devices, vol. ED-26, no. 6, June1979 (“Chatterjee-3”), which is hereby incorporated herein, in itsentirety, by reference thereto, the deep n-type implant isolates theshallow p-type implant and connects the n-type source and drain regions.

Terada et al. have proposed a Capacitance Coupling (CC) cell in “A NewVLSI Memory Cell Using Capacitance Coupling (CC) Cell”, K. Terada etal., pp. 1319-1324, IEEE Transactions on Electron Devices, vol. ED-31,no. 9, September 1984 (“Terada”), while Erb has proposed StratifiedCharge Memory in “Stratified Charge Memory”, D. M. Erb, pp. 24-25, IEEEInternational Solid-State Circuits Conference, February 1978 (“Erb”),both of which are hereby incorporated herein, in their entireties, byreference thereto.

DRAM based on the electrically floating body effect has been proposedboth in silicon-on-insulator (SOI) substrate (see for example “TheMultistable Charge-Controlled Memory Effect in SOI Transistors at LowTemperatures”, Tack et al., pp. 1373-1382, IEEE Transactions on ElectronDevices, vol. 37, May 1990 (“Tack”), “A Capacitor-less 1T-DRAM Cell”, S.Okhonin et al., pp. 85-87, IEEE Electron Device Letters, vol. 23, no. 2,February 2002 (“Okhonin”) and “Memory Design Using One-Transistor GainCell on SOI”, T. Ohsawa et al., pp. 152-153, Tech. Digest, 2002 IEEEInternational Solid-State Circuits Conference, February 2002 (“Ohsawa”),which are hereby incorporated herein, in their entireties, by referencethereto) and in bulk silicon (see for example “A one transistor cell onbulk substrate (1T-Bulk) for low-cost and high density eDRAM”, R. Ranicaet al., pp. 128-129, Digest of Technical Papers, 2004 Symposium on VLSITechnology, June 2004 (“Ranica-1”), “Scaled 1T-Bulk Devices Built withCMOS 90 nm Technology for Low-Cost eDRAM Applications”, R. Ranica etal., 2005 Symposium on VLSI Technology, Digest of Technical Papers(“Ranica-2”), “Further Insight Into the Physics and Modeling ofFloating-Body Capacitorless DRAMs”, A. Villaret et al, pp. 2447-2454,IEEE Transactions on Electron Devices, vol. 52, no. 11, November 2005(“Villaret”), “Simulation of intrinsic bipolar transistor mechanisms forfuture capacitor-less eDRAM on bulk substrate”, R. Pulicani et al., pp.966-969, 2010 17th IEEE International Conference on Electronics,Circuits, and Systems (ICECS) (“Pulicani”), which are herebyincorporated herein, in their entireties, by reference thereto).

Widjaja and Or-Bach describe a bi-stable SRAM cell incorporating afloating body transistor, where more than one stable state exists foreach memory cell (for example as described in U.S. Patent ApplicationPublication No. 2010/00246284 to Widjaja et al., titled “SemiconductorMemory Having Floating Body Transistor and Method of Operating”(“Widjaja-1”) and U.S. Patent Application Publication No. 2010/0034041,“Method of Operating Semiconductor Memory Device with Floating BodyTransistor Using Silicon Controlled Rectifier Principle” (“Widjaja-2”),which are both hereby incorporated herein, in their entireties, byreference thereto). This is bi-stability is achieved due to the appliedback bias which causes impact ionization and generates holes tocompensate for the charge leakage current and recombination. The appliedback bias may be a constant voltage back bias or, alternatively, aperiodic pulse of voltage.

Memories are often configured into arrays to improve density andefficiency. For single transistor memories, the most commonly used arrayconfiguration are the NOR and NAND array. Memory technologies such asFlash, EEPROM, EPROM, ROM, PROM, Metal Programmable ROM and Antifusehave all been published using variations of both the NAND and/or NORarray structures. The term NOR or NAND configuration refers to howmemory elements are connected in the bit line direction. Typicallymemory arrays are arranged in rows and columns. When an array isarranged so the memory elements in the column direction directly connectto the same common node/line, the connection is said to be in a NORconfiguration. For example, 1-transistor NOR Flash Memory has the columnconfiguration where every memory cell has its drain terminal directlyconnected to common metal line often called the bit line. Note that in aNOR configuration, care must be taken to ensure that unselected cellswithin a bit line do not interfere with the reading, write or erase ofthe selected memory cell. This is often a major complication for arraysconfigured in the NOR orientation since they all share a singleelectrically connected bit line.

A NAND connection on the other hand has multiple memory cells connectedserially together (for example, as described in U.S. Pat. No. 8,514,622,“Compact Semiconductor Memory Device Having Reduced Number of Contacts,Methods of Operating and Methods of Making”, which is herebyincorporated herein, in its entirety, by reference thereto). A largegroup of serially connected memory cells will then be connected to aselect or access transistor. These access or select devices will thenconnect to the bit line, source line or both. For example NAND Flash hasa Select Drain Gate (SGD) which connects to 32 to 128 serially connectedNAND memory cells. NAND Flash also has a second select gate for thesource typically called Select Gate Source (SGS). These NAND groupingsof SGD, NAND memory cells and SGS are typically referred to as a NANDString. These Strings are connected through the SGD device to the bitline. Note that the SGD device blocks any interaction between the NANDMemory cells within the string to the bit line.

SUMMARY OF THE INVENTION

In one aspect of the present invention, a NAND string configuration isprovided that includes: a plurality of semiconductor memory cellsserially connected to one another to form a string of semiconductormemory cells; a select gate drain device connecting one end of thestring of semiconductor memory cells to a bit line; and a select gatesource device connecting an opposite end of said string of semiconductormemory cells to a common source line; wherein serial connections betweenat least two of the semiconductor memory cells are contactless.

In at least one embodiment, all serial connections between thesemiconductor memory cells are contactless, so that only a contact tothe select gate drain device and a contact to the select gate sourcedevice are provided.

In at least one embodiment, the NAND string is configured to perform atleast one of: injecting charge into or extracting charge out of aportion of at least one of the semiconductor memory cells to maintain astate of the at least one semiconductor memory cell.

In at least one embodiment, at least one of the semiconductor memorydevices each comprise a floating body region configured to store data ascharge therein to define a state of the semiconductor memory cell; and aback bias region configured to perform the at least one of injectingcharge into or extracting charge out of at least a portion of thefloating body region.

In at least one embodiment, the floating body region is provided in afin structure that extends vertically above the back bias region.

In another aspect of the present invention, a semiconductor memory arrayis provided that includes: a plurality of NAND string configurations,each NAND string configuration including: a plurality of semiconductormemory cells serially connected to one another to form a string ofsemiconductor memory cells; a select gate drain device connected at oneend of the string of semiconductor memory cells; and a select gatesource device connected an opposite end of the string of semiconductormemory cells; wherein serial connections between at least two of thesemiconductor memory cells are contactless; and wherein thesemiconductor memory array comprises at least one of: at least two ofthe select gate drain devices connected to a common bit line; or atleast two of the select gate source devices connected to a common sourceline.

In at least one embodiment, the semiconductor array includes: a firstset of two or more NAND string configurations connected to the commonbit line, wherein the common bit line is a first common bit line; and atleast a second set of two or more NAND string configurations connectedto at least a second common bit line; wherein the first common bit lineand the at least a second common bit line are connected to a primary bitline.

In at least one embodiment, the semiconductor array includes: a firstset of two or more NAND string configurations connected to the commonsource line, wherein the common source line is a first common sourceline; and at least a second set of two or more NAND stringconfigurations connected to at least a second common source line;wherein the first common source line and the at least a second commonsource line are connected to a primary source line.

In at least one embodiment, at least one of the semiconductor memorycell each include a floating body region configured to store data ascharge therein to define a state of the semiconductor memory cell; and aback-bias region configured to perform at least one of injecting chargeinto or extracting charge out of at least a portion of the floating bodyregion.

In at least one embodiment, the floating body region is provided in afin structure that extends vertically above the back bias region.

In another aspect of the present invention, a semiconductor memory cellis provided that includes: a floating body region configured to becharged to a level indicative of a state of the memory cell, thefloating body region have a first conductivity type selected from p-typeconductivity type and n-type conductivity type; the floating body regionhaving a bottom surface bounded by an insulator layer; a first region inelectrical contact with the floating body region, the first regionexposed at or proximal to a top surface of the floating body region andextending to contact the insulator layer; a second region in electricalcontact with the floating body region and spaced apart from the firstregion, the second region exposed at or proximal to the top surface ofthe floating body region and extending into the floating body region,wherein the floating body region underlies the second region such thatthe second region does not extend to contact the insulator layer; athird region in electrical contact with the floating body region andspaced apart from the first and second regions, the third region exposedat or proximal to the top surface of the floating body region andextending to contact the insulator layer; and a gate positioned betweenthe first and second regions; wherein the third region is configured tofunction as a collector region to maintain a charge of the floating bodyregion, thereby maintaining the state of the floating body region.

In at least one embodiment, the floating body is formed in a substratehaving the first conductivity type and the insulator is a buried layerpositioned between the bottom surface of the floating body region and alower portion of the substrate.

In at least one embodiment the top surface of the floating body regionis a top surface of the substrate.

In at least one embodiment, the first, second and third regions have asecond conductivity type selected from the p-type conductivity type andthe n-type conductivity type, and wherein the second conductivity typeis different from the first conductivity type.

In at least one embodiment, the semiconductor memory cell furtherincludes a second gate positioned between the second and third regions.

In at least one embodiment, the first and third regions electricallyisolate the floating body region from neighboring floating body regionsof adjacent ones of the semiconductor memory cell when a plurality ofthe semiconductor memory cells are joined in an array.

In at least one embodiment, the floating body region and the first,second and third regions are provided in a fin structure that extendsvertically above the insulator layer.

In another aspect of the present invention, a method of making a memorycell includes: providing a substrate including a floating body regionconfigured to be charged to a level indicative of a state of the memorycell, the floating body region have a first conductivity type selectedfrom p-type conductivity type and n-type conductivity type; formingfirst and second gate regions above a top surface of the floating bodyregion, wherein the first and second gate regions are spaced apart fromone another. performing an ion implantation process at first angle to anormal to the top surface and at a second angle to the normal to the topsurface, wherein the first and second angles are applied from oppositesides of the memory cell and are mirror images of one another; andwherein the gate regions partially block the ion implantationtherebetween, resulting in a shallow ion implantation in between thegate regions as a second region; and wherein first and third regionsformed outside of the gate regions are deep ion implantation regions.

In at least one embodiment, the method further includes adjusting adistance between the gate regions to vary the depth of the resultantshallow region, wherein decreasing the distance makes the shallow regionmore shallow and, conversely, increasing the distance makes the shallowregion relatively deeper.

In another aspect of the present invention, a method of making a memorycell includes: providing a substrate including a floating body regionconfigured to be charged to a level indicative of a state of the memorycell, the substrate and floating body region have a first conductivitytype selected from p-type conductivity type and n-type conductivitytype; forming a buried insulator layer between a bottom surface of thefloating body region and a lower region of the substrate: forming afirst region in electrical contact with the floating body region, thefirst region exposed at or proximal to a top surface of the substrateand extending to contact the insulator layer; forming a third region inelectrical contact with the floating body region and spaced apart fromthe first, the third region exposed at or proximal to the top surfaceand extending to contact the insulator layer; contacting a member to thetop surface at a location between the first and third regions and spacedapart from the first and third regions, the member being doped with asecond conductivity type material selected from p-type conductivity typeand n-type conductivity type and different from the first conductivitytype; thermally annealing the member a floating body region, wherebydopant outdiffusion from the member forms a second region in thefloating body spaced apart from the first and third regions andshallower than the first and third regions, the second region being inelectrical contact with the floating body region, exposed at or proximalto the top surface and extending into the floating body region, whereinthe floating body region underlies the second region such that thesecond region does not extend to contact the insulator layer.

In at least one embodiment, the member comprises polysilicon materialdoped with the second conductivity type material.

In at least one embodiment, the member comprises conductive material.

In at least one embodiment, the conductive material includes at leastone of: tungsten, tantalum, titanium, nitrides of tungsten, nitrides oftantalum and nitrides of titanium.

Other aspects of the present invention include the construction, use andoperation of floating body memory cells in an array configured in a NANDorientation.

These and other features of the invention will become apparent to thosepersons skilled in the art upon reading the details of the arrays,strings, memory cells and methods as more fully described below.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross-sectional, illustration of a floating body memory cellpreviously described in Widjaja-1 and Widjaja-2.

FIG. 2 is a cross-sectional illustration of two floating body memorycells connected in a NAND string configuration, according to anembodiment of the present invention.

FIG. 3A is a schematic representation of floating body memory cellsarranged into a NAND string formation, according to an embodiment of thepresent invention.

FIG. 3B is a schematic representation of an array of multiple rows andcolumns of floating body memory cells arranged in NAND strings,according to an embodiment of the present invention.

FIG. 4A is a waveform diagram of a bit line write 0 operation, accordingto an embodiment of the present invention.

FIG. 4B is a waveform diagram of a source write 0 operation, accordingto an embodiment of the present invention.

FIG. 4C is a waveform diagram of a multiple row/chip write 0 operation,according to an embodiment of the present invention.

FIG. 5 is a waveform diagram of a string selective write 0 operation,according to an embodiment of the present invention.

FIG. 6 is a waveform diagram of a partial string selective write 0operation, according to an embodiment of the present invention.

FIG. 7 is a waveform diagram of a capacitive selective write 0,according to an embodiment of the present invention.

FIG. 8 is a waveform diagram of a capacitive selective write 0 with ahigh source bias, according to an embodiment of the present invention.

FIG. 9 is a waveform diagram of a selective write 1 operation, accordingto an embodiment of the present invention.

FIG. 10 is a waveform diagram of a selective write 1 operation with ahigh source bias, according to an embodiment of the present invention.

FIG. 11 is a waveform diagram of a read operation according to anembodiment of the present invention.

FIG. 12 is a waveform diagram of an alternate method to perform a readoperation utilizing the transistor back bias, according to an embodimentof the present invention

FIG. 13 is a cross-sectional illustration of an entire floating bodyNAND string, according to an embodiment of the present invention.

FIG. 14 is a layout view of a floating body NAND string, according to anembodiment of the present invention.

FIG. 15 illustrates a segmented local bit line array structure,according to an embodiment of the present invention.

FIG. 16 illustrates a segmented local source line array structure,according to an embodiment of the present invention.

FIG. 17 is a schematic, top view of a memory device according to anembodiment of the present invention.

FIG. 18 is a schematic, cross-sectional view of the memory device ofFIG. 17 taken along line I-I′.

FIG. 19 is a schematic, cross-sectional view of the memory device ofFIG. 17 taken along line II-II′.

FIG. 20 is a schematic, three-dimensional view of the memory device ofFIG. 17 .

FIG. 21 is a schematic, three dimensional view of a variation of thememory device shown in FIG. 20 .

FIG. 22 is a schematic, three-dimensional view like FIG. 20 , butshowing exemplary bias conditions.

FIGS. 23 and 24 illustrate equivalent circuit representations of amemory cell, according to an embodiment of the present invention,

FIG. 25A shows a band diagram of a bipolar device of a memory cell whenthe floating body region (or the lower portion of the floating bodyregion) is positively charged and a positive bias is applied to theburied region, according to an embodiment of the present invention.

FIG. 25B shows an energy band diagram of an intrinsic bipolar devicewhen the floating body region is neutrally charged and a bias voltage isapplied to the buried well region, according to an embodiment of thepresent invention.

FIG. 25C shows a graph of net current I flowing into or out of afloating body region as a function of potential (voltage) V of thefloating body (not drawn to scale), according to an embodiment of thepresent invention.

FIG. 25D shows a schematic curve of a potential energy surface (PES) ofa memory cell, according to an embodiment of the present invention.

FIG. 25E shows an increase in maximum charge V_(MC) stored in a floatingbody, as a result of applying a positive bias to the BW terminal,according to an embodiment of the present invention.

FIG. 26 illustrates exemplary bias conditions for a read operation on amemory cell according to an embodiment of the present invention.

FIG. 27 illustrates an exemplary write logic-1 operation using aband-to-band tunneling mechanism, according to an embodiment of thepresent invention.

FIG. 28 illustrates exemplary bias conditions for a write logic-1operation through an impact ionization mechanism according to anembodiment of the present invention.

FIG. 29 illustrates exemplary bias conditions for a write logic-0operation according to an embodiment of the present invention.

FIG. 30 illustrates a memory cell according to another embodiment of thepresent invention.

FIG. 31 illustrates one example of bias conditions for performing aholding operation according to an embodiment of the present invention,

FIG. 32 illustrates an equivalent circuit representation of the memorycell of FIG. 30 .

FIG. 33 illustrates a read operation performed on the memory cell ofFIG. 30 , according to an embodiment of the present invention

FIG. 34 illustrates an exemplary write logic-1 operation usingband-to-band tunneling mechanism, according to an embodiment of thepresent invention

FIG. 35 illustrates exemplary bias conditions for a write logic-1operation through an impact ionization mechanism, according to anembodiment of the present invention

FIG. 36 illustrates exemplary bias conditions for performing a writelogic-0 operation, according to an embodiment of the present invention

FIGS. 37A and 37B illustrate exemplary process steps to achieve ashallower region relative to deeper regions within a memory cell,according to various embodiment of the present invention.

FIG. 38 schematically illustrates a memory cell according to anotherembodiment of present invention.

FIG. 39 illustrates a memory cell having a fin structure fabricated on asubstrate, according to an embodiment of the present invention.

DETAILED DESCRIPTION OF THE INVENTION

Before the present memory cells, strings, arrays and methods aredescribed, it is to be understood that this invention is not limited toparticular embodiments described, as such may, of course, vary. It isalso to be understood that the terminology used herein is for thepurpose of describing particular embodiments only, and is not intendedto be limiting, since the scope of the present invention will be limitedonly by the appended claims.

Where a range of values is provided, it is understood that eachintervening value, to the tenth of the unit of the lower limit unlessthe context clearly dictates otherwise, between the upper and lowerlimits of that range is also specifically disclosed. Each smaller rangebetween any stated value or intervening value in a stated range and anyother stated or intervening value in that stated range is encompassedwithin the invention. The upper and lower limits of these smaller rangesmay independently be included or excluded in the range, and each rangewhere either, neither or both limits are included in the smaller rangesis also encompassed within the invention, subject to any specificallyexcluded limit in the stated range. Where the stated range includes oneor both of the limits, ranges excluding either or both of those includedlimits are also included in the invention.

Unless defined otherwise, all technical and scientific terms used hereinhave the same meaning as commonly understood by one of ordinary skill inthe art to which this invention belongs. Although any methods andmaterials similar or equivalent to those described herein can be used inthe practice or testing of the present invention, the preferred methodsand materials are now described. All publications mentioned herein areincorporated herein by reference to disclose and describe the methodsand/or materials in connection with which the publications are cited.

It must be noted that as used herein and in the appended claims, thesingular forms “a”, “an”, and “the” include plural referents unless thecontext clearly dictates otherwise. Thus, for example, reference to “astring” includes a plurality of such strings and reference to “thememory cell” includes reference to one or more memory cells andequivalents thereof known to those skilled in the art, and so forth.

The dates of publication provided regarding the publications describedherein may be different from the actual publication dates which may needto be independently confirmed.

FIG. 1 shows a floating body memory cell (FBMC) 102 that has beendescribed for example in Widjaja-1 and Widjaja-2. The cell 102 includesa substrate 12 of a first conductivity type, such as a p-typeconductivity type, for example. Substrate 12 is typically made ofsilicon, but may comprise germanium, silicon germanium, galliumarsenide, carbon nanotubes, or other semiconductor materials known inthe art. The substrate 12 has a surface 14. A first region 20 a having asecond conductivity type, such as n-type, for example, is provided insubstrate 12 and is exposed at surface 14. A second region 20 b havingthe second conductivity type is also provided in substrate 12, and isalso exposed at surface 14. Second region 20 b is spaced apart from thefirst region 20 a, as shown. First region 20 a and second region 20 bmay be formed by an implantation process on the material making upsubstrate 12, according to any of implantation processes known andtypically used in the art. Alternatively, a solid state diffusionprocess may be used to form first region 20 a and second region 20 b.

A buried layer 22 of the second conductivity type is also provided inthe substrate 12, buried in the substrate 12, as shown. Buried layer 22may also be formed by an ion implantation process on the material ofsubstrate 12. Alternatively, buried layer 22 can be grown epitaxially. Afloating body region 24 of the substrate 12 having a first conductivitytype, such as a p-type conductivity type, is bounded by surface 14,first and second regions 20 a, 20 b, insulating layers 26 and buriedlayer 22. Insulating layers 26 (e.g., shallow trench isolation (STI)),may be made of silicon oxide, for example. Insulating layers 26 insulatecell 102 from neighboring cells 102 when multiple cells 102 are joinedin an array. A gate 60 is positioned in between the regions 20 a and 20b, and above the surface 14. The gate 60 is insulated from surface 14 byan insulating layer 62. Insulating layer 62 may be made of silicon oxideand/or other dielectric materials, including high-K dielectricmaterials, such as, but not limited to, tantalum peroxide, titaniumoxide, zirconium oxide, hafnium oxide, and/or aluminum oxide. The gate60 may be made of polysilicon material or metal gate electrode, such astungsten, tantalum, titanium and their nitrides.

In another embodiment, the memory cell 102 may be provided with n-typeconductivity type as the first conductivity type and p-type conductivitytype as the second conductivity type.

Operation of floating body memory cell (FBMC) 102 of FIG. 1 isdescribed, for example in Widjaja-1 and Widjaja-2, which are herebyincorporated herein, in their entireties by reference thereto.

FIG. 2 is a cross-sectional illustration of two serially connectedfloating body memory cells to be used in a FB NAND string 100 accordingto an embodiment of the present invention. Node 70 (70 a, 70 b) is thegate connection to the FBMC 102, 102 a, 102 b (node 70 a is gateconnection to FBMC 102 a and node 70 b is gate connection to FBMC 102b), which is typically constructed of a polysilicon or metal material.In FIG. 2 , nodes 72 and 74 are the source/drain lines which areconnected to node 20 a and 20 c, (the n+ regions for the NMOStransistor), respectively. Region 24 is the p-type floating body; region22 is the buried well region, while node 76 is the connection to theDNWell. Region 12 is the substrate and node 78 is the connection to thesubstrate. Region 26 is the shallow trench isolation (STI). Referencenumeral 64 indicates the serial connection between two adjacent cells inthe NAND configuration.

FIG. 3A is a schematic representation of floating body memory cells(FBMC) 102 arranged into a NAND string formation according to anembodiment of the current invention. The floating body NAND string 100is strung with a plurality of floating body memory cells 102 (e.g., 102a-102 z, as illustrated, although greater or fewer numbers of floatingbody memory cells 102 may be employed to make floating body NAND string100). The number of cells provided in the figure are meant for exemplarypurposes only and not meant to limit the scope of this invention.Examples include but are not limited to having a string length of 32, 64or 128 floating body memory cells in length. An NMOS (n-channel MOS(metal-oxide-semiconductor)) transistor 101 is connected to a series ofserially connected floating body memory cells (102 a to 102 z). NMOStransistor 101 is also connected to the bit line 110. This NMOS device101 will be referred to as the Select Gate Drain or SGD 101. Multiplefloating body NAND strings 100 will be connected to the same common bitline 110 through these SGD devices 101. The floating body memory cells102 a to 102 z are connected serially together. The last floating bodymemory cell in the string 102 z is connected to NMOS device 103. Thisdevice 103 is connected to a common source 118, which can be shared withother floating body NAND strings 100 along columns and/or rows as shownin FIG. 3B, which shows an example of how multiple rows and columns maybe configured together to form an array 195. The gate of device 103 isconnected to line 116 and is shared among other floating body NAND (FBNAND) strings 100 along the same row. Line 113 is shared between allcells within the floating body NAND string 100 and is connected to theburied well layer 22 to each of the floating body memory cells 102within the string 100. Line 111 is connected to the substrate 12 and isshared between all FBMC 102 within the NAND string 100 as well as theselect transistors SGD 101 and Select Gate Source (SGS) 103. Substrate12 is typically made of silicon, but may also comprise, for example,germanium, silicon germanium, gallium arsenide, carbon nanotubes, orother semiconductor materials. A buried layer 22 of a secondconductivity type such as n-type, for example, is provided in thesubstrate 12. Buried layer 22 may be formed by an ion implantationprocess on the material of substrate 12. Alternatively, buried layer 22can be grown epitaxially on top of substrate 12. Note that thisinvention is being described as being formed on bulk silicon. Thisinvention also applies to silicon on insulator (SOI) substrates as well.

As described in Widjaja-1 and Widjaja-2, each FBMC 102 a to 102 z hastwo distinct stable states which will be referred to as state “1” andstate “0” throughout this disclosure. State “1” is defined as a stablestate where the floating body 24 voltage is at a high voltage such as0.6V, while state “0” is defined as a stable state where the floatingbody 24 is at a low voltage such as 0V. A FBMC 102 that is set to be instate “1” will have a high potential at the floating body 24 which inturn will also lower the FBMC 102 threshold voltage better known as Vt.By lowering the Vt of the FBMC 102, the high floating body potentialmakes the FBMC 102 easier to conduct by requiring less voltage on thegate 60 to induce conduction between source (20 a or 20 b) and drain(the other of 20 a and 20 b), than that required when FBMC is in state“0”. Alternatively, a FBMC 102 that is set to be in state “0” will havea floating body voltage close to 0V. FBMC 102 in state “0” will have ahigher Vt than FBMC in state “1” and thus require a higher bias on thegate 60 terminal in order to turn on this FBMC 102 and allow conductionbetween source (one of 20 a and 20 b) and drain (the other of 20 a and20 b) of the FBMC 102.

The floating body NAND string 100 has a static or standby conditionwhere the bit line 110 is kept at a low potential such as 0V, the SelectGate Drain or SGD Device 101 is driven high through line 112, the SelectGate Source or SGS device 103 is driven high through line 116, and thesource line 118 is driven to a low potential such as 0V. All word lines114 a through 114 z are held at a high enough potential to ensure theNMOS transistor of each FBMC 102 a-102 z is turned on regardless of thefloating body 24 bias of each. As an example, 1.8V may be used for theword line standby voltage. The voltage applied to the DNWell connection113 is kept at a high potential to allow proper bi-stable operation ofthe floating body memory cell 102. As an example 1.8V may be used here.The substrate 12 connection 111 will be held at a low potential such as0V. Throughout this disclosure, unless specifically mentioned, theDNWell 113 and substrate 111 connections can always be assumed to be ahigh voltage (1.8V) and a low voltage (0v), respectively, to ensureproper operation of the FBMC 102. Those skilled in the art willappreciate that the detailed voltages, descriptions and examplesprovided throughout this disclosure are meant for exemplary purposesonly and are in no way meant to limit the scope and range of thisinvention.

To set all the FBMC 102 within the FB NAND string 100 to state “0”, ahigh negative voltage in the range of −1.0V to −3.0V can be applied tothe bit line 110, such as −1.8V as shown in FIG. 4A. Word lines 114 a to114 z can be kept at the standby voltage of 1.8V. Assuming that the SGD101 device is initially at the standby voltage of 1.8V, the highnegative voltage will propagate through the SGD device 101 since thepotential between gate and source will be considerably higher than theVt of the NMOS device 101 and FBMC 102. This propagation of the negativebit line 110 voltage will continue throughout the entire string 100proceeding to pass through devices 102 a to 102 z. In each of thefloating body memory cells 102, a highly negative source/drain voltagewill forward bias the p-n junction diode between floating body 24 andthe n+ source/drain 20 a/20 b thereby causing evacuation of holes fromthe floating body 24. The SGS line 116 will be driven to a negativevoltage in order to turn off and prevent the propagation of the negativevoltage from the bit line into the source line. Note that this operationwill also affect any other cells 102 attached to the same bit line 110depending on the bias of SGD 112 along other strings attached to thesame bit line. If all SGD 112 devices attached to the same bit line areenabled this can be used to erase an entire bit line 110 of memory array195. Alternately, the write 0 operation may also be implemented throughthe source as shown in FIG. 4B. In this case, the SGS line 116 isenabled and the SGD line 112 is disabled to prevent propagation of thenegative source into the bit line. This would allow for all the cellsattached to the same source line to be set to a write 0 conditionsimultaneously. FIG. 4C shows yet another embodiment of the write 0operation where both source and bit lines are being driven negative andthe SGD 112 and SGS 116 lines are both enabled. In this situation, thenegative voltage required to implement write 0 can propagate across thebit line and source line. Those skilled in the art will appreciate howthe principle identified in FIG. 4C provides the ability to implement awrite 0 operation across multiple rows, blocks or even a full chip byenabling multiple rows of the SGD 112 and SGS 116 lines. Note all thewaveform diagrams provided within this disclosure are for exemplarypurposes only and are not meant to limit the scope or range of thisinvention.

An alternate method to perform a write “0” operation (illustrated inFIG. 5 , Selective String Write 0) can be employed by selectivelysetting an FB NAND string 100 to state “0” without using a negativevoltage on the SGD 101 and SGS 103 devices. In this method, the SGDdevice 101 is used as a state “0” select device. A slightly negativevoltage is applied through bit line 110 that is below the NMOS Vt (e.g.,about −0.4V), which is negative enough to forward bias the p-n junctionbetween the p-type floating body 24 and the transistor n+ source/drain(20 a/20 b), but low enough to avoid turning on SGD/SGS NMOS devices(101 and 103) when those devices are driven to a low potential like 0V.For example if an NMOS device has Vt of around 0.6V, the bit line 110can be biased with a −0.4V bias. This voltage will not pass through theSGD device 101 unless a voltage of at least 0.2V is applied to the gate112 of the SGD device 101.

Once the negative bit line 110 voltage has been passed through the SGDdevice 101, it will then set FBMC 102 a to state “0” due to the forwardbiasing of the p-n junction between floating body and n+ region of thefloating body NMOS device 102. Note that the assumed p-n junctionforward bias is only in the situation where the floating body 24 is at ahigh potential such as 0.6V. If the floating body is already at state“0”, there may be little to no current being consumed, since the p-njunction may not have enough potential to forward bias. Since FBMC 102 ais also an NMOS device similar to the SGD device 101, it also will berequired to have the gate 114 a to be high in order to pass the negativevoltage to device 102 b. If all the word line voltages 114 a to 114 zare high, then the entire string will pass the negative bit linevoltage. During this operation the SGS device 103 will be turned off bydriving the gate 116 to a low enough potential to disable this device103. An exemplary waveform diagram of this selective write “0” operationis shown in FIG. 5 .

The method of write “0” described with regard to FIG. 5 can be slightlymodified to provide additional selectivity within the NAND string 100for which bits are set to state “0” by controlling the word linevoltages (refer to FIG. 6 , Partial Selective String Write 0). Byselectively setting the word lines high or low, the user has the optionto control how many cells 102 within the NAND string 100 or rows of thearray 195 will be set to state “0”. However there is a limitation inthat the negative voltage must be contiguously passed from the bit line110 or source 118. Any word line set to 0V can stop the propagation ofthe negative voltage thus limiting the number of cells 102 or rows ofthe array 195 that are set to state “0”. For example, if a negativevoltage is driven from the bit line 110 through the SGD device 101 and114 b is set to 0V, while 114 a, 114 c, and 114 z are set to a highpositive voltage, then the first cell 102 a will be set to state “0”,while all the remaining cells below (in this example, 114 b to 114 z)will be unaffected. This allows for additional selectivity while settingbits to state “0”, with the limitation that the number of rows must beconnected to the negative bit line or source line voltage. An exemplarywaveform diagram of this partial selective write “0” operation isprovided in FIG. 6 .

To selectively set a single cell to state “0”, capacitive coupling maybe employed in conjunction with toggling the state of the DNWell, anexample of which is illustrated in FIG. 7 . To implement thisalternative method to write a state “0”, the bit line 110 is used toindicate whether it is desired to perform a write “0” operation orinhibit a write “0” operation. A high positive voltage, such as about+1.8V is applied if it is desired to perform a write “0” operation. Alow voltage, such as about 0V is applied if it is desired to inhibit awrite “0” operation. At the same time all the FBMC word lines 114 a-zare driven to a high potential to turn on the selected and unselectedcells 102 while the SGD device 101 is driven to a high potential suchthat under normal operation the SGD device 101 will properly conduct.The SGS device 103 of the selected string 100 is turned off by groundingthe SGS gate line 116. At this point the DNWell 113 will be driven fromits standby high voltage to a low voltage such that the bi-stablebehavior of the FBMC 102 is temporarily disabled. The selected word line(114 b in FIG. 7 ) will then be driven from a high potential to a lowpotential, however the low potential must still be high enough to ensurethat the selected word line will still conduct. For example a voltage of1.8V may be used as the high selected word line potential and 0.7V maybe used for the low bit line potential. This will cause the floatingbody to couple down through gate coupling in the case where the bit line110 is high and the FB NAND String 100 is electrically isolated. In thecase where the bit line 110 was set to an inhibit 0V state, the 0V willpass through the FB NAND string 100 and act as a shield against anycoupling from the gate.

An exemplary waveform diagram of the capacitive selective write “0”operation can be found in FIG. 7 . The source 118 bias as shown in FIG.7 may alternatively be driven to high, as shown in FIG. 8 , to preventany sort of leakage from the string 100 that may occur when the sourceline is grounded as in FIG. 7 . In both FIG. 7 and FIG. 8 it is possibleto, alternatively (but not shown) keep the DNWell bias high throughoutthe entire capacitive selective write 0 operation. This may cause ahigher write current and may require additional coupling due to the needto compete against the bi-stable behavior of the floating body memorycell 102.

To set an individual cell 102 to state “1” within the floating body NANDstring 100 (e.g., see FIG. 9 ), a high bit line 110 voltage can beapplied such as 1.8V. The SGD device 101 of the selected string 100 isdriven to 1.8V through line 112. The SGD device 101 is in cutoff sincethe voltage between gate and source is less than the NMOS transistorthreshold voltage (Vt). All word lines are initially held at a highpotential such as 1.8V per the standby state. The selected word line isdriven to a low voltage such as 0V. The SGS gate line 116 is set to 0Vto turn off the SGS device 103. The selected word line is then drivenfrom 0V, to a high voltage such as 1.8V. The low to high voltage ramp onthe word line will cause floating gate potential due to the capacitivecoupling between gate 60 to floating body 24. Once the selected wordline has been driven above the state “1” voltage, the bi-stable behaviorof the FBMC 102 will take effect and hold the floating body 24 to thisstate until power is removed. This will effectively set the FBMC 102 tostate “1” using capacitive coupling. Note that the sequence presentedabove is for exemplary purposes only and can be modified to variousdifferent orders. It is also possible, but not diagramed here, to removethe DNWell bias before the selected word line voltage is applied. TheDNWell voltage in this scenario would be reapplied once the FBMC hasbeen set to state “1”.

To inhibit the setting of state “1” to other (nonselected) cells 102within the same word line, the bit line 110 can be held at 0V instead of1.8V. This causes the SGD device 101 to turn on. Since all theunselected FBMC 102 are biased to a high voltage the 0V can pass throughthe FB NAND string 100 to the selected FBMC 102. When the selected wordline goes high a channel will develop since the transistor is now fullyturned on. This channel will be at a near ground potential and preventthe floating body coupling to the rising gate voltage. This will inhibitprogramming in unselected columns. Note that between setting state “1”and state “0” the only difference is the bit line voltage. This providesbit selectivity during the write state “1” process, while the writestate “0” process is limited to an entire FB NAND string or a portion ofa FB NAND string.

Unselected floating body NAND strings 100 not within the same selectedrow will have their SGD devices 101 driven to ground to turn off the SGDdevices 101. To properly maintain the bi-stable behavior of the floatingbody cells 102 within these floating body NAND strings 100, the SGSdevices 103 in the unselected strings 100 can be driven high and groundcan be provided through the source side without impacting the bit line110 voltage. An exemplary waveform diagram of the write 1 including theinhibit operation is provided in FIG. 9 . Note that the source line canalternatively be biased to a high potential such as 1.8V to avoidpotential leakage out from the FB NAND string 100 as shown in FIG. 10 .

An exemplary read operation is shown in FIG. 11 . In this operation thebit line 110 is driven to a high potential to allow conduction ofcurrent through the FB NAND String 100. Note the bit line bias can beactively supplied or pre-charged to a high potential. The selected wordline (114 b in FIG. 11 example) is driven to a low potential which turnsoff the selected transistor of FBMC 102 b. The SGD device 101 is alsoturned on by applying high potential via 112, to allow conductionthrough the FB NAND string 100. In the case where the FBMC 102 is set tostate “1”, the high bias of the floating body 24 will turn on thelateral bipolar transistor (formed by the drain region 20 a or 20 b,floating body region 24, and the source region (the other of 20 a or 20b) shown in FIG. 1 as described, for example, in PCT/US13/26466 toWidjaja et al., titled “Memory Cell Comprising First and SecondTransistors and Methods of Operating” (“Widjaja-3”), which is herebyincorporated herein, in its entirety, by reference thereto), thusallowing for a strong conduction between source and drain which will inturn cause a current through the bit line 110, causing a voltage drop onthe bit line 110 or discharge of the bit line 110. In the case where theFBMC 102 is set to state “0”, the bias of the floating body 24 will below, which will not enable the lateral bipolar. A device 102 set tostate “0” will appear off without any conduction which will have littleto no active current through the bit line 110 nor will it discharge thebit line 110. From here, a large variety of methods to sense the FBMC102 state can be easily employed such as bit line voltage sensing or bitline current sensing. An example of this operation is shown in thewaveform in FIG. 11 .

An alternate method to read the FB NAND string 100 is illustrated inFIG. 12 . In this alternate method the transistor is biased to the pointwhere the FBMC 102 at state “1” will strongly turn on, but a FBMC 102 atstate “0” will not have the transistor strongly conducting. In this readoperation, the selected word line 114 b is driven to an exemplaryvoltage of 0.4V. Similar to the previous read method in FIG. 11 , thestate of the FBMC 102 can be read on the bit line 110 through numerousmethods which will be understood by those skilled in the art. Methodsmay include but are not limited to, bit line current sensing, activecurrent voltage level detecting, and capacitive voltage dischargesensing.

FIG. 13 is a schematic, cross-sectional illustration of an entirefloating body NAND string 100, according to an embodiment of the presentinvention. FIG. 14 is a top view illustration of a pair of floating bodyNAND strings 100 a, 100 b. Within these two diagrams, device 101 is theSGD device, while 103 is the SGS device. Reference numeral 70D indicatesthe gate connection terminal for the SGD device 101, 61 is the gate ofthe SGD device 101, which is typically made from polysilicon or metal,63 is the gate dielectric of the SGD device 101, region 25 is the p-typewell for the SGD NMOS transistor of device 101, and 16 and 20 a are then+ regions of the transistor of device 101. Terminal 70S is the gateconnection for the SGS device 103, 65 is the gate material of the SGSdevice 103, often made from polysilicon or metal, 67 is the gatedielectric (for example made of silicon oxide or other materialdescribed above with regard to gate dielectric 63), of the NMOStransistor, 18 and 20 m represent the n+ regions of the SGS NMOStransistor of device 103 and 27 is the p-type well of the SGS NMOSdevice. Between devices 101 and 103 and connected thereto are aplurality of floating body memory cells 102 a through 102 m. Referencenumerals 20 a through 20 m represent the n+ regions of the NMOStransistors of the floating body memory cells 102 a-102 m, respectively.Regions 24 a through 24 m represent the p-type floating bodies of thefloating body memory cells 102 a to 102 m. Region 26 is the shallowtrench isolation or STI. Region 22 is the buried well layer region.Region 12 is the substrate connection, while 78 is the substrateterminal electrically connected to the substrate 12. Node 64 is aconductive connection between adjacent floating body memory cells whichcreates the serial string of memory cells.

To further reduce bit line capacitance and leakage a segmented local bitline array structure can be adopted as shown in FIG. 15 , for example.Additional NMOS transistors 200 a, 200 b to 200 z can be used to isolatethe primary bit line 300 from a plurality of local bit lines 304 a, 304b to 304 z. The local bit lines are attached to multiple floating bodymemories such as but not limited to FB NAND strings 100. Examples offloating body memory cells that can be used in FB NAND strings include,but are not limited to: single transistor (1T) floating body memorycells, such as described for example in Widjaja-1, Widjaja-2, Tack,Okhonin, Ohsawa, Villaret, Ranica, and Pulicani, and two transistors(2T) floating body memory cells, such as described for example inWidjaja-3, which is hereby incorporated herein, in its entirety, byreference thereto. In FIG. 15 the local bit lines 304 a, 304 b, . . . ,304 z are each shown to be connected to a plurality of FB NAND strings100. Note that this segmenting is not only limited to what is shown inFIG. 15 , but, for example, can be further repeated where primary bitline 300 is also connected to another NMOS device which will have ahigher level bit line which would be connected to multiple primary bitlines 300. Additionally local bit lines may also contain biasingtransistors which could bias the bit lines to voltages to reduce bitleakage, and provide proper biasing for bi-stable operation. Thesebiasing transistors are not shown but can be easily understood by thoseskilled in the art.

The source lines can also be segmented into local source line structuresas shown in FIGS. 16 . 504 a, 504 b, 504 c, to 504 z are a plurality oflocal source lines connected to a plurality of FB NAND strings 100. NMOStransistors 400 a, 400 b, 400 c to 400 z are isolation transistors whichcan electrically isolate the local source lines from the primary sourceline 500. Gate signals 502 a to 502 z can be used to electricallyconnect the local source line to the primary source line. Note thatfurther segmenting of the source line 500 is also possible but is notshown here. To add a further level of segmenting, an additionalisolation NMOS transistor can be connected to primary source line 500.This in turn can be connected to a higher level source line which wouldbe connected to multiple primary source lines 500. It is noted thatbiasing transistors can also be provided in the local source lines butare not shown here and are easily understood by those skilled in theart. The source lines segmentation may also be applied for otherfloating body memory cells, such as described in Widjaja-1, Widjaja-2,Tack, Okhonin, Ohsawa, Villaret, Ranica, Pulicani, and Widjaja-3.

Schematic views showing a top-view, cross-sectional views, andthree-dimensional views of a memory device 50 according to an embodimentof the present invention are shown in FIGS. 17-21 , respectively. Memorycell 50 has a fin structure 52 fabricated on substrate 12 of a firstconductivity type such as p-type for example, so as to extend from thesurface of the substrate to form a three-dimensional structure, with fin52 extending substantially perpendicular to and above the top surface ofthe substrate 12. Fin structure 52 is semiconductive and is built onburied well layer 22 of a second conductivity type such as n-type forexample, which is itself built on top of substrate 12. Alternatively,buried well 22 could be a diffusion region inside substrate 12 with therest of the fin 52 constructed above it, or buried well 22 could be aconductive layer on top of substrate 12 connected to all the other fin52 structures in a manner similar to memory cell 50 described above. Fin52 is typically made of silicon, but may comprise germanium, silicongermanium, gallium arsenide, carbon nanotubes, or other semiconductormaterials known in the art. In other embodiments, substrate 12A can be awell of the first conductivity type embedded in either a well 29 of thesecond conductivity type or, alternatively, in the bulk of thesemiconductor wafer of the second conductivity type, such as n-type, forexample as shown in FIG. 21 . To simplify the description, the substrate12 will usually be drawn as the semiconductor bulk material as it is inFIGS. 18-20 .

Buried well layer 22 may be formed by an ion implantation process on thematerial of substrate 12. Alternatively, buried well layer 22 may begrown epitaxially above substrate 12. Buried well layer 22, which has asecond conductivity type (such as n-type conductivity type),electrically isolates the floating body region 24, which has a firstconductivity type (such as p-type conductivity type), from the bulksubstrate 12 also of the first conductivity type. Fin structure 52includes bit line region 16 and source line region 18 having a secondconductivity type (such as n-type conductivity type).

Memory cell 50 further includes gate 60 enclosing the upper portion 24Uof the floating body region, as illustrated in FIGS. 18-20 . The gate 60is positioned between the bit line region 16 and the source line region18, adjacent to the floating body region 24, as best seen in FIGS. 19-20. The gate 60 is insulated from the floating body region 24 by aninsulating layer 62. Insulating layer 62 may be made of silicon oxideand/or other dielectric materials, including high-K dielectricmaterials, such as, but not limited to, tantalum peroxide, titaniumoxide, zirconium oxide, hafnium oxide, and/or aluminum oxide. The gate60 may be made of, for example, polysilicon material or metal gateelectrode, such as tungsten, tantalum, titanium and their nitrides.

The floating body region 24 of the first conductivity type is bounded byinsulating layer 62, source line region 16, drain region 18. on thebottom by buried layer 22, and by insulating layers 26. Floating body 24may be the portion of the original substrate 12 above buried layer 22 ifburied layer 22 is implanted. Alternatively, floating body 24 may beepitaxially grown. Depending on how buried layer 22 and floating body 24are formed, floating body 24 may have the same doping as substrate 12 insome embodiments or a different doping, if desired in other embodiments.The floating body region 24U comprises the upper portion of the floatingbody region 24 that is surrounded by the gate region 60, while the lowerportion of the floating body region is indicated as region 24L. Thedoping concentrations between the upper and lower portion of thefloating body regions 24U and 24L may be the same. However, the upperand lower portion of the floating body regions 24U and 24L may havedifferent doping concentrations. For example, the lower portion of thefloating body region 24L may be more highly doped than the upper portionof the floating body region 24U. In one embodiment, the upper portion ofthe floating body region 24U may comprise an intrinsic-type floatingbody region, where no significant amount of dopant species is present,and the lower portion of the floating body region 24L may have a firstconductivity type, such as p-type, for example.

A source line region 16 having a second conductivity type, such asn-type, for example, is provided in fin 52. Source line region 16 may beformed by an implantation process on the material making up fin 52,according to any implantation process known and typically used in theart. Alternatively, a solid state diffusion or a selective epitaxialgrowth process could be used to form source line region 16.

A bit line region 18 having a second conductivity type, such as n-type,for example, is also provided in fin 52. Bit line region 18 may beformed by an implantation process on the material making up fin 52,according to any implantation process known and typically used in theart. Alternatively, a solid state diffusion or a selective epitaxialgrowth process could be used to form bit line region 18.

Insulating layers 26 (like, for example, shallow trench isolation(STI)), may be made of silicon oxide, for example, though otherinsulating materials may be used. The bottom of insulating layer 26 mayreside inside the buried region 22 allowing buried region 22 to becontinuous as shown in FIG. 18-20 . Alternatively, the bottom ofinsulating layer 26 may reside below the buried region 22 (not shown).This requires a shallower insulating layer 28, which insulates thefloating body region 24, but allows the buried layer 22 to be continuousin the direction of the cross-sectional view shown in FIG. 19 . Forsimplicity, only memory cell 50 with continuous buried region 22 in alldirections will be shown from hereon. Further alternatively, the bottomof insulating layer 26 may reside above the buried layer region 22.

Cell 50 includes several terminals: word line (WL) terminal 70electrically connected to gate 60, bit line (BL) terminal 74electrically connected to bit line region 18, source line (SL) terminal72 electrically connected to source line region 16, buried well (BW)terminal 76 electrically connected to buried layer 22, and substrate(SUB) terminal 78 electrically connected to the substrate 12 (see FIGS.20-21 ).

Several operations can be performed by memory cell 50 such as holding,read, write logic-1 and write logic-0 operations.

The memory cell states are represented by the charge such as holes inthe floating body region 24 of the first conductivity. In oneembodiment, the charge is stored uniformly across the floating bodyregion 24. In another embodiment, the upper portion of the floating bodyregion 24U is fully depleted, and the charge is preferentially stored inthe lower portion of the floating body region 24L. If cell 50 has holesstored in the floating body region 24, then the memory cell 50 will havea lower threshold voltage (gate voltage where transistor is turned on)compared to when cell 50 does not store holes in floating body region24. Alternatively, if cell 50 has holes stored in the floating bodyregion 24, then the memory cell 50 will conduct a higher current (fromthe bit line region 18 to the source line region 16, for example)compared to when cell 50 does not store holes in the floating bodyregion 24.

The positive charge stored in the floating body region 24 will decreaseover time due to the p-n diode leakage formed by the floating bodyregion 24 and regions 16, 18, and 22, and due to charge recombination. Aholding operation may be applied in parallel to memory cells 50, whichis performed by applying a positive back bias to the BW terminal 76,zero or low negative bias on the WL terminal 70, and zero bias on the SLterminal 72, BL terminal 74, and SUB terminal 78. The positive back biasapplied to the buried layer region 22 connected to the BW terminal 76will maintain the state of the memory cell 50 that it is connected to bymaintaining the charge stored in the floating body region 24.

FIG. 22 illustrates one example of bias conditions for performing aholding operation, where the following voltages are applied to memorycell 50: 0.0 volts is applied to WL terminal 70, SL terminal 72, BLterminal 74, and SUB terminal 78, and a positive voltage like, forexample, +1.2 volts is applied to BW terminal 76. In other embodiments,different voltages may be applied to the various terminals of memorycell 50 as a matter of design choice and the exemplary voltagesdescribed are not limiting in any way.

The principles of the holding operation performed on memory cell 50 maybe illustrated through the equivalent circuit representation of thememory cell 50 shown in FIG. 23 . FIG. 23 illustrates the equivalentcircuit representation of memory cell 50, showing the intrinsic bipolartransistors 32 and 34 formed by the buried well region 22, the floatingbody region 24, and the source line region 16 or the bit line region 18,respectively. Also inherent in memory cell 50 is the bipolar device 36,formed by the source line region 16, floating body region, 24, and thedrain region 18. For drawings clarity, bipolar device 36 is shownseparately in FIG. 24 .

FIG. 25A shows the band diagram of the bipolar device 32 when thefloating body region 24 (or the lower portion of the floating bodyregion 24L) is positively charged and a positive bias is applied to theburied region 22. The energy band diagram of the bipolar device 34 issimilar to the one shown in FIG. 25A, with the drain region 18 replacingthe source line region 16. The dashed lines indicate the Fermi levels inthe various regions of the bipolar device 32. The Fermi level is locatedin the band gap between the solid line 27 indicating the top of thevalence band (the bottom of the band gap) and the solid line 29indicating the bottom of the conduction band (the top of the band gap)as is well known in the art. If floating body 24 is positively charged,a state corresponding to logic-1, the bipolar transistors 32 and 34 willbe turned on as the positive charge in the floating body region lowersthe energy barrier of electron flow into the base region. Once injectedinto the floating body region 24, the electrons will be swept into theburied well region 22 (connected to BW terminal 76) due to the positivebias applied to the buried well region 22. As a result of the positivebias, the electrons are accelerated and create additional hot carriers(hot hole and hot electron pairs) through an impact ionizationmechanism. The resulting hot electrons flow into the BW terminal 76while the resulting hot holes will subsequently flow into the floatingbody region 24. When the following condition is met: β×(M−1)≈1− where βis the forward common-emitter current gain of the bipolar transistor 32or 34 and M is the impact ionization coefficient—the amount of holesinjected into the floating body region 24 compensates for the chargelost due to p-n junction forward bias current between the floating bodyregion 24 and the source line region 16 or bit line region 18 and due toholes recombination. As a result of a positive-feedback mechanism, thisprocess maintains the charge (i.e. holes) stored in the floating bodyregion 24 which will keep the n-p-n bipolar transistors 32 and 34 on foras long as a positive bias is applied to the buried well region 22through BW terminal 76.

The region where the product β×(M−1) approaches 1 and is characterizedby hole current moving into the base region of a bipolar transistor issometimes referred to as the reverse base current region and has beendescribed for example in “A New Static Memory Cell Based on Reverse BaseCurrent (RBC) Effect of Bipolar Transistor”, K. Sakui et al., pp. 44-47,International Electron Devices Meeting, 1988 (“Sakui-1”), “A New StaticMemory Cell Based on the Reverse Base Current Effect of BipolarTransistors”, K. Sakui et al., pp. 1215-1217, IEEE Transactions onElectron Devices, vol. 36, no. 6, June 1989 (“Sakui-2”), “On BistableBehavior and Open-Base Breakdown of Bipolar Transistors in the AvalancheRegime—Modeling and Applications”, M. Reisch, pp. 1398-1409, IEEETransactions on Electron Devices, vol. 39, no. 6, June 1992 (“Reisch”),all of which are hereby incorporated herein, in their entireties, byreference thereto.

The latching behavior based on the reverse base current region has alsobeen described in a biristor (i.e. bi-stable resistor) for example in“Bistable resistor (Biristor)—Gateless Silicon Nanowire Memory”, J.-W.Han and Y.-K. Choi, pp. 171-172, 2010 Symposium on VLSI Technology,Digest of Technical Papers, 2010 “(“J.-W. Han”), which is herebyincorporated herein, in its entirety, by reference thereto. In atwo-terminal biristor device, a refresh operation is still required.J.-W. Han describes a 200 ms data retention for the silicon nanowirebiristor memory. In memory cell 50, the state of the memory cell ismaintained due to the vertical bipolar transistors 32 and 34, while theremaining cell operations (i.e. read and write operations) are governedby the lateral bipolar transistor 36 and/or MOS transistor 40. Hence,the holding operation does not require any interruptions to the memorycell 50 access.

If floating body 24 is neutrally charged (the voltage on floating body24 being equal to the voltage on grounded source line region 16), astate corresponding to logic-0, no current will flow through bipolartransistors 32 and 34. The bipolar devices 32 and 34 will remain off andno impact ionization occurs. Consequently memory cells in the logic-0state will remain in the logic-0 state.

FIG. 25B shows the energy band diagram of the intrinsic bipolar device32 when the floating body region 24 is neutrally charged and a biasvoltage is applied to the buried well region 22. In this state theenergy level of the band gap bounded by solid lines 27A and 29A isdifferent in the various regions of bipolar device 32. Because thepotential of the floating body region 24 and the source line region 16is equal, the Fermi levels are constant, resulting in an energy barrierbetween the source line region 16 and the floating body region 24. Solidline 23 indicates, for reference purposes, the energy barrier betweenthe source line region 16 and the floating body region 24. The energybarrier prevents electron flow from the source line region 16 (connectedto SL terminal 72) to the floating body region 24. Thus the bipolardevice 32 will remain off.

An autonomous refresh for a floating body memory, without requiring tofirst read the memory cell state, has been described for example in“Autonomous Refresh of Floating Body Cell (FBC)”, Ohsawa et al., pp.801-804, International Electron Device Meeting, 2008 (“Ohsawa”), U.S.Pat. No. 7,170,807 “Data Storage Device and Refreshing Method for Usewith Such Device”, Fazan et al. (“Fazan”), which are hereby incorporatedherein, in their entireties, by reference thereto. Ohsawa and Fazanteach an autonomous refresh method by applying periodic gate and drainvoltage pulses, which interrupt access to the memory cells beingrefreshed. In memory cell 50, more than one stable state is achievedbecause of the vertical bipolar transistors 32 and 34. The read andwrite operations of the memory cell 50 are governed by the lateralbipolar transistor 36 and/or MOS transistor 40. Hence, the holdingoperation does not require any interruptions to the memory cell 50access.

In the holding operation described in FIG. 22 , there is no individuallyselected memory cell. Rather cells are selected in rows by the buriedwell terminals 76 and may be selected as individual rows, as multiplerows, or as all of the rows comprising the memory array.

FIG. 25C shows a graph of the net current I flowing into or out of thefloating body region 24 as a function of the potential V of the floatingbody 24 (not drawn to scale). A negative current indicates a net currentflowing into the floating body region 24, while a positive currentindicates a net current flowing out of the floating body region 24. Atlow floating body 24 potential, between 0V and V_(FB0) indicated in FIG.25C, the net current is flowing into the floating body region 24 as aresult of the p-n diode formed by the floating body region 24 and theburied well region 22 being reverse biased. If the value of the floatingbody 24 potential is between V_(FB0) and V_(TS), the current will switchdirection, resulting in a net current flowing out of the floating bodyregion 24. This is because of the p-n diode, formed by the floating bodyregion 24 and the buried well region 22, being forward biased as thefloating body region 24 becomes increasingly more positive. As a result,if the potential of the floating body region 24 is less than V_(TS),then at steady state the floating body region 24 will reach V_(FB0). Ifthe potential of the floating body region 24 is higher than V_(TS), thecurrent will switch direction, resulting in a net current flowing intothe floating body region 24. This is as a result of the base currentflowing into the floating body region 24 being greater than the p-ndiode leakage current. When the floating body 24 potential is higherthan V_(FB1), the net current will be out of the floating body region24. This is because the p-n diode leakage current is once again greaterthan the base current of the bipolar devices 32 and 34.

The holding operation results in the floating body memory cell havingtwo stable states: the logic-0 state and the logic-1 state separated byan energy barrier, which are represented by V_(FB0), V_(FB1), andV_(TS), respectively. FIG. 25D shows a schematic curve of a potentialenergy surface (PES) of the memory cell 50, which shows anotherrepresentation of the two stable states resulting from applying a backbias to the BW terminal 76 (connected to the buried well region 22).

The values of the floating body 24 potential where the current changesdirection, i.e. V_(FB0), V_(FB1), and V_(TS), can be modulated by thepotential applied to the BW terminal 76. These values are alsotemperature dependent.

The holding/standby operation also results in a larger memory window byincreasing the amount of charge that can be stored in the floating body24. Without the holding/standby operation, the maximum potential thatcan be stored in the floating body 24 is limited to the flat bandvoltage V_(FB) as the junction leakage current to regions 16 and 18increases exponentially at floating body potential greater than V_(FB).However, by applying a positive voltage to BW terminal 76, the bipolaraction results in a hole current flowing into the floating body 24,compensating for the junction leakage current between floating body 24and regions 16 and 18. As a result, the maximum charge V_(MC) stored infloating body 24 can be increased by applying a positive bias to the BWterminal 76 as shown in FIG. 25E. The increase in the maximum chargestored in the floating body 24 results in a larger memory window.

Floating body DRAM cells described in Ranica, Villaret, and Pulicanionly exhibit one stable state, which is often assigned as logic-0 state.Villaret describes the intrinsic bipolar transistors enhance the dataretention of logic-1 state, by drawing the electrons which otherwisewould recombine with the holes stored in the floating body region.However, only one stable state is observed because there is no holeinjection into the floating body region to compensate for the chargeleakage and recombination.

A read operation of the memory cell 50, according to an embodiment ofthe present invention, is illustrated in FIG. 26 . The amount of chargestored in the floating body region 24 may be sensed by monitoring thecell current of the memory cell 50. If memory cell 50 is in a logic-1state having holes in the body region 24, then the memory cell 0 willhave a higher cell current (e.g. current flowing from the BL terminal 74to the SL terminal 72), compared to if cell 50 is in a logic-0 statehaving no holes in the body region 24. A sensing circuit typicallyconnected to the BL terminal 74 can then be used to determine the datastate of the memory cell 50.

A read operation for example can be performed on memory cell 50 byapplying the following bias conditions: zero or positive bias is appliedto the WL terminal 70, a positive voltage is applied to the BL terminal74, zero voltage is applied to the SL terminal 72, zero or positivevoltage is applied to the BW terminal 76, and zero voltage is applied tothe SUB terminal 78. If memory cell 50 is in a logic-1 state havingholes in the floating body region 24, then a higher current will flowfrom the BL terminal 74 to the SL terminal 72 of the selected memorycell 50, compared to if memory cell 50 is in a logic-0 state having noholes in the floating body region 24. Current may flow from the BLterminal 74 to the SL terminal 72 through the transistor 40 and/or thebipolar transistor 36 (where the current may flow through the lowerportion of the floating body region 24L). In one particular embodiment,about +1.2 volts is applied to the WL terminal 70, about +0.4 volts isapplied to the BL terminal 74, about 0.0 volts is applied to the SLterminal 72, about +1.2 volts is applied to the BW terminal 76, andabout 0.0 volts is applied to the SUB terminal 78.

FIG. 27 illustrates an exemplary write logic-1 operation using aband-to-band tunneling mechanism, where the following bias conditionsare applied: a negative voltage is applied to the WL terminal 70, apositive voltage is applied to the BL terminal 74, zero bias is appliedto the SL terminal 72, zero or positive voltage is applied to the BWterminal 76, and zero bias is applied to the SUB terminal 78. Thepositive bias applied to the drain region of the memory cell 50(connected to the BL terminal 74) along with the negative voltageapplied to the gate 60 (connected to the WL terminal 70) will create astrong electric field around the junction area of the drain region 18 inthe proximity of the gate 60. The strong electric field bends the energyband sharply upward near the gate 60 and drain region 18 junctionoverlap region, causing electrons to tunnel from the valence band of thefloating body region 24 to the conduction band of the drain region 18,leaving holes in the valence band of the floating body region 24. Theelectrons which tunnel across the energy band become the drain region 18leakage current, while the holes are injected into floating body region24 and become the hole charge that creates the logic-1 state.

In one particular non-limiting embodiment, about −1.2 volts is appliedto the WL terminal 70, about +1.2 volts is applied to the BL terminal74, about 0.0 volts is applied to the SL terminal 72, about +1.2 voltsis applied to the BW terminal 76, and about 0.0 volts is applied to theSUB terminal 78, as shown in FIG. 27 .

FIG. 28 illustrates exemplary bias conditions for a write logic-1operation through an impact ionization mechanism according to anembodiment of the present invention, where the following bias conditionsare applied: a positive voltage is applied to the WL terminal 70, apositive voltage is applied to the BL terminal 74, zero voltage isapplied to the SL terminal 72, zero or positive voltage is applied tothe BW terminal 76, and zero voltage is applied to the SUB terminal 78.The positive voltage applied to the WL terminal 70 and the BL terminal74 is configured to maximize hole generation through the impactionization process, where the voltage on the bit line region 18 of thememory cell 50 is typically greater than the voltage applied to the gate60.

In one particular non-limiting embodiment, about +0.5 volts is appliedto the WL terminal 70, about +1.2 volts is applied to the BL terminal74, about 0.0 volts is applied to the SL terminal 72, about +1.2 voltsis applied to the BW terminal 76, and about 0.0 volts is applied to theSUB terminal 78. These voltage levels are exemplary only and may varyfrom embodiment to embodiment. Thus the exemplary embodiments, features,bias levels, etc., described are not limiting.

FIG. 29 illustrates exemplary bias conditions for a write logic-0operation according to an embodiment of the present invention: anegative voltage is applied to the SL terminal 72, zero voltage isapplied to the WL terminal 70, BL terminal 74, and SUB terminal, andzero or positive voltage is applied to the BW terminal 76. Under theseconditions, the p-n junction between the floating body 24 and the sourceline region 16 is forward-biased, evacuating holes from the floatingbody 24. All memory cells sharing the same SL terminal 72 will bewritten to simultaneously. To write arbitrary binary data to differentmemory cells 50, a write logic-0 operation is first performed on all thememory cells to be written, followed by one or more write logic-1operations on the memory cells that must be written to logic-1.

In one particular non-limiting embodiment, about −1.2 volts is appliedto the selected SL terminal 72, about 0.0 volts is applied to the WLterminal 70, BL terminal 74, and SUB terminal 78, and about +1.2 voltsis applied to the BW terminal 76. These voltage levels are exemplaryonly and may vary from embodiment to embodiment. Thus the exemplaryembodiments, features, bias levels, etc., described are not limiting.

FIG. 30 illustrates memory cell 150 according to another embodiment ofthe present invention. Cell 150 is formed in and/or on a substrate 12 ofa first conductivity type, such as a p-type conductivity type, forexample. Substrate 12 may include any suitable substrate, anillustrative, non-exclusive example of which includes a silicon oninsulator (SOI) substrate. Similarly, substrate 12 may be formed fromany suitable semiconductor material. Illustrative, non-exclusiveexamples of suitable semiconductor materials include silicon, germanium,silicon germanium, gallium arsenide, carbon nanotubes, and/or othersemiconductor materials.

Substrate 12 has a surface 14 and includes a buried insulator layer 22.Buried insulator layer 22 may include any suitable dielectric material,an illustrative, non-exclusive example of which includes silicon oxide.

Memory cell 150 includes a first region 18 having a second conductivitytype, such as an n-type conductivity type, that is formed in substrate12, a second region 16 having the second conductivity type that isformed in substrate 12 and spaced apart from the first region 18, and athird region 20 having the second conductivity type that is formed insubstrate 12 and spaced apart from the first and second regions 18 and16, respectively. First, second and third regions 18, 16 and 20,respectively, may be exposed at and/or proximal to surface 14 and may beformed using any suitable method and/or process, illustrative,non-exclusive examples of which include ion implantation and/or solidstate diffusion and/or epitaxial growth.

A floating body region 24, having a first conductivity type, such as ap-type conductivity type, is bounded by surface 14, first, second andthird regions 18, 16, and 20, respectively, and by buried insulatorlayer 22. Floating body region 24 may be formed using any suitablemethod and/or process, illustrative, non-exclusive examples of whichinclude an ion implantation process and/or epitaxial growth.

Referring back to FIG. 30 , the method and/or process utilized to formfirst and third regions 18 and 20, respectively, may be optimized suchthat the regions 18 and 20 reach buried insulator layer 22 andelectrically isolate floating body 24 from a neighboring floating body24 of an adjacent cell when multiple cells 150 are joined in an array.On the other hand, the method and/or process utilized to form secondregion 16 may be optimized such that region 16 does not reach buriedinsulator layer 22. Therefore, floating body 24 is not isolated on theside by the second region 16.

A first gate 60 may be positioned in between the regions 16 and 18, andabove the surface 14. Cell 150 may or may not comprise a second gate 64,When included, gate 64 may be positioned in between the regions 16 and20, and above the surface 14, as shown in FIG. 30 . Gate 60 is insulatedfrom surface 14 by a first insulating layer 62 and gate 64 is insulatedfrom surface 14 by a second insulating layer 66. Insulating layers 62and 66 may be formed from any suitable dielectric material.Illustrative, non-exclusive examples of suitable dielectric materialsinclude silicon oxide, high-K dielectric materials, tantalum peroxide,titanium oxide, zirconium oxide, hafnium oxide, and/or aluminum oxide.Gates 60 and 64 may be made from any suitable conductive material.Illustrative, non-exclusive examples of a suitable conductive materialinclude a polysilicon material, a metal gate electrode, tungsten,tantalum, titanium and/or their nitrides.

Cell 150 further includes a WL terminal 70 electrically connected togate 60, a second word line WL2 terminal 71 electrically connected togate 64, a source line (SL) terminal 72 electrically connected to region16, a bit line (BL) terminal 74 electrically connected to region 18, asecond bit line (BL2) terminal 76 electrically connected to region 20,and a SUB terminal 78 electrically connected to substrate 12.

As discussed in more detail herein, the conductivity types describedabove are exemplary conductivity types and other conductivity typesand/or relative conductivity types are also within the scope of thepresent disclosure. As an illustrative, non-exclusive example, memorycell 150 may have and/or include an n-type conductivity type as thefirst conductivity type and a p-type conductivity type as the secondconductivity type.

Several operations can be performed by memory cell 150 such as holding,read, write logic-1 and write logic-0 operations.

A holding operation may be performed on memory cell 150 following thesame principle as the holding operation of memory cell 50, where theholding operation is performed by applying a positive bias to the BL2terminal 76, zero or low negative bias on the WL terminal 70, zero orlow positive bias on WL2 terminal 71, and zero bias on the SL terminal72, BL terminal 74, and SUB terminal 78. The positive bias applied tothe region 20 connected to the BL2 terminal 76 will maintain the stateof the memory cell 150 that it is connected to by maintaining the chargestored in the floating body region 24.

FIG. 31 illustrates one example of bias conditions for performing aholding operation according to an embodiment of the present invention,where the following voltages are applied to memory cell 150: 0.0 voltsis applied to WL terminal 70, WL2 terminal 71, SL terminal 72, BLterminal 74, and SUB terminal 78, and a positive voltage like, forexample, +1.2 volts is applied to BL2 terminal 76. In other embodiments,different voltages may be applied to the various terminals of memorycell 150 as a matter of design choice and the exemplary voltagesdescribed are not limiting in any way.

The principles of the holding operation performed on memory cell 150 maybe illustrated through the equivalent circuit representation of thememory cell 150 shown in FIG. 32 . FIG. 32 illustrates the equivalentcircuit representation of memory cell 150, showing the intrinsic lateralbipolar transistors 132 and 133 formed by the source line region 16, thefloating body region 24, and the bit line regions 18 and 20,respectively. The BL2 terminal 76 functions as the back-bias region orthe collector region of the bipolar transistor which maintains thecharge of the floating body region 24.

If the floating body region 24 is positively charged, the lateralbipolar transistor 133 will be turned on as the positive charge in thefloating body region 24 lowers the energy barrier of electron flow intothe base region (the floating body region 24). Once injected into thefloating body region 24, the electrons will be swept into the region 20(connected to BL2 terminal 76) due to the positive bias applied to theregion 20. As a result of the positive bias, the electrons areaccelerated and create additional hot carriers (hot hole and hotelectron pairs) through an impact ionization mechanism. The resultinghot electrons flow into the BL2 terminal 76 while the resulting hotholes will subsequently flow into the floating body region 24. When thefollowing condition is met: β×(M−1)≈1− where β is the forwardcommon-emitter current gain of the bipolar transistor 133 and M is theimpact ionization coefficient—the amount of holes injected into thefloating body region 24 compensates for the charge lost due to p-njunction forward bias current between the floating body region 24 andthe source line region 16 or bit line region 18 and due to holesrecombination. As a result of a positive-feedback mechanism, thisprocess maintains the charge (i.e. holes) stored in the floating bodyregion 24 which will keep the n-p-n bipolar transistors 133 on for aslong as a positive bias is applied to the region 20 (connected to BL2terminal 76).

If the floating body region 24 is neutral, the bipolar device 133 willremain off because the energy barrier between the floating body region24 and the source line region 16 will prevent electron flow from sourceline region 16 (connected to SL terminal 72) to the floating body region24. As a result, the floating body region 24 will remain neutral.

FIG. 33 illustrates a read operation performed on memory cell 150according to an embodiment of the present invention, by applying thefollowing bias conditions: zero or positive bias is applied to the WLterminal 70, zero or negative bias is applied to the WL2 terminal 71, apositive voltage is applied to the BL terminal 74, zero voltage isapplied to the SL terminal 72, zero or positive voltage is applied tothe BL2 terminal 76, and zero voltage is applied to the SUB terminal 78.If memory cell 150 is in a logic-1 state having holes in the floatingbody region 24, then a higher current will flow from the BL terminal 74to the SL terminal 72 of the selected memory cell 150, compared to ifmemory cell 150 is in a logic-0 state having no holes in the floatingbody region 24. Current may flow from the BL terminal 74 to the SLterminal 72 through the transistor 130 and/or the bipolar transistor 132(where the current may flow through the lower portion of the floatingbody region 24). In one particular embodiment, about +1.2 volts isapplied to the WL terminal 70, about +0.4 volts is applied to the BLterminal 74, about 0.0 volts is applied to the WL2 terminal 71, about0.0 volts is applied to the SL terminal 72, about +1.2 volts is appliedto the BL2 terminal 76, and about 0.0 volts is applied to the SUBterminal 78.

FIG. 34 illustrates an exemplary write logic-1 operation usingband-to-band tunneling mechanism, according to an embodiment of thepresent invention, where the following bias conditions are applied: zeroor negative bias is applied is applied to the WL terminal 70, a negativevoltage to the WL2 terminal 71, zero bias is applied to the BL terminal74 and the SL terminal 72, a positive voltage is applied to the BL2terminal 76, and zero bias is applied to the SUB terminal 78. Thepositive bias applied to the drain region of the memory cell 150(connected to the BL2 terminal 76) along with the negative voltageapplied to the gate 64 (connected to the WL2 terminal 71) will create astrong electric field around the junction area of the drain region 20 inthe proximity of the gate 64. The strong electric field bends the energyband sharply upward near the gate 64 and drain region 20 junctionoverlap region, causing electrons to tunnel from the valence band of thefloating body region 24 to the conduction band of the drain region 20,leaving holes in the valence band of the floating body region 24. Theelectrons which tunnel across the energy band become the drain region 20leakage current, while the holes are injected into floating body region24 and become the hole charge that creates the logic-1 state.

In one particular non-limiting embodiment, about 0.0 volts is applied tothe WL terminal 70, about −1.2 volts is applied to the WL2 terminal 71,about 0 volts is applied to the BL terminal 74, about 0.0 volts isapplied to the SL terminal 72, about +1.2 volts is applied to the BL2terminal 76, and about 0.0 volts is applied to the SUB terminal 78.

FIG. 35 illustrates exemplary bias conditions for a write logic-1operation through an impact ionization mechanism, according to anembodiment of the present invention, where the following bias conditionsare applied: zero bias is applied to the WL terminal 70, a positivevoltage is applied to the WL2 terminal 71, zero bias is applied to theBL terminal 74, zero voltage is applied to the SL terminal 72, apositive voltage is applied to the BL2 terminal 76, and zero voltage isapplied to the SUB terminal 78. The positive voltage applied to the WL2terminal 71 and the BL2 terminal 76 is configured to maximize holegeneration through the impact ionization process, where the voltage onthe bit line region 20 of the memory cell 150 is typically greater thanthe voltage applied to the gate 64.

In one particular non-limiting embodiment, about 0 volts is applied tothe WL terminal 70, about +0.5 volts is applied to the WL2 terminal 71,about 0 volts is applied to the BL terminal 74, about 0.0 volts isapplied to the SL terminal 72, about +1.2 volts is applied to the BL2terminal 76, and about 0.0 volts is applied to the SUB terminal 78.These voltage levels are exemplary only and may vary from embodiment toembodiment. Thus the exemplary embodiments, features, bias levels, etc.,described are not limiting.

FIG. 36 illustrates exemplary bias conditions for performing a writelogic-0 operation, according to an embodiment of the present invention,by applying the following bias conditions: a negative voltage is appliedto the SL terminal 72, zero voltage is applied to the WL terminal 70,WL2 terminal 71, BL terminal 74, and SUB terminal 78, and zero orpositive voltage is applied to the BL2 terminal 76. Under theseconditions, the p-n junction between the floating body 24 and the sourceline region 16 is forward-biased, evacuating holes from the floatingbody 24. All memory cells sharing the same SL terminal 72 will bewritten to simultaneously. To write arbitrary binary data to differentmemory cells 150, a write logic-0 operation is first performed on allthe memory cells to be written, followed by one or more write logic-1operations on the memory cells that must be written to logic-1.

In one particular non-limiting embodiment, about −1.2 volts is appliedto the selected SL terminal 72, about 0.0 volts is applied to the WLterminal 70, WL2 terminal 71, BL terminal 74, and SUB terminal 78, andabout +1.2 volts is applied to the BL2 terminal 76. These voltage levelsare exemplary only and may vary from embodiment to embodiment. Thus theexemplary embodiments, features, bias levels, etc., described are notlimiting.

FIGS. 37A and 37B illustrate exemplary process steps to achieveshallower region 16 relative to the regions 18 and 20. FIG. 37Aillustrates an ion implantation process, where the ion implantation isperformed at angles 98 a, 98 b to the normal 99 to the surface 14. Forexample, ion implantation is performed from one side of device 150 (leftside as shown in FIG. 37A) at an angle 98 a between 0° and 45°(counterclockwise, as shown in FIG. 37A), and ion implantation isperformed from the other side of device 150 (right side as shown in FIG.37A) at an angle 98 b between 0° and 45° (clockwise, as shown in FIG.37A, or between 315° and 360° if measured in the same direction as angle98 a). Typically the angles 98 a and 98 b are mirror images of oneanother on opposite sides of the normal 99, but this is not required.For example, an asymmetric shallow region 16 can be formed by makingangle 98 a not equal and opposite to angle 98 b. The neighboring gateregions 60 and 64 will create a shadow region with respect to the ionimplantation, resulting in a lower implant dose in the region in betweenthe gate regions 60 and 64, which subsequently results in a shallowerregion 16. The separation distance between the gate regions 60 and 64may also be optimized to create a smaller opening, which willsubsequently result in a shallower region 16. For example, the narrowerspace between gate regions 60 and 64 may result in a shallower region16. Furthermore, the higher thickness of the gate regions 60 and 62 mayresult in a shallower region 16.

FIG. 37B illustrates a process step to form a shallower region 16according to another embodiment of the present invention. In thisembodiment, regions 18 and 20 are made by the typical processes thathave been described previously, such as by a normal ion implantationprocess, for example, and the region that is to be made into region 16is left undoped, so that it is the same are region 24. Region 68 is madefrom polysilicon material doped with the second conductivity type suchas n-type. Subsequent thermal annealing will result in dopantoutdiffusion from the polysilicon region 68 to form a shallower region16. Region 68 may also be made of other conductive material,illustrative, non-exclusive examples of which include a metal electrode,tungsten, tantalum, titanium and/or their nitrides, which will form aSchottky contact between the region 68 and the region 16.

FIG. 38 illustrates memory cell 250 according to another embodiment ofpresent invention. Memory cell 250 comprises only one gate region 60.The second gate region that is present in memory cell 150 (i.e. gate 64)is absent in memory cell 250.

FIG. 39 illustrates memory cell 150V which has a fin structure 52fabricated on substrate 12 of a first conductivity type, such as ap-type conductivity type, for example. Substrate 12 may include anysuitable substrate, an illustrative, non-exclusive example of whichincludes a silicon on insulator (SOI) substrate. Similarly, substrate 12may be formed from any suitable semiconductor material, illustrative,non-exclusive examples of which include silicon, germanium, silicongermanium, gallium arsenide, carbon nanotubes, and/or othersemiconductor materials.

Substrate 12 has a surface and includes a buried insulator layer 22.Buried insulator layer 22 may include any suitable dielectric material,an illustrative, non-exclusive example of which includes silicon oxide.

Memory cell 150V includes a first region 18 having a second conductivitytype, such as an n-type conductivity type, that is formed in fin 52, asecond region 16 having the second conductivity type that is formed infin 52 and spaced apart from the first region 18, and a third region 20having the second conductivity type that is formed in fin 52 and spacedapart from the first and second regions 18 and 16, respectively. First,second and third regions 18, 16 and 20, respectively, may be exposed atand/or proximal to the surface and may be formed using any suitablemethod and/or process, illustrative, non-exclusive examples of whichinclude ion implantation and/or solid state diffusion and/or epitaxialgrowth.

First and third regions 18 and 20, respectively, reach buried insulatorlayer 22 and insulate floating body 24 from a neighboring floating body24 of an adjacent cell when multiple cells 150V are joined in an array.On the other hand, the method and/or process utilized to form secondregion 16 may be optimized such that region 16 does not reach buriedinsulator layer 22. Therefore, floating body 24 is not isolated on theside by the second region 16.

The operation of the memory cell 150V is similar to that of memory cell150.

While the foregoing written description of the invention enables one ofordinary skill to make and use what is considered presently to be thebest mode thereof, those of ordinary skill will understand andappreciate the existence of variations, combinations, and equivalents ofthe specific embodiment, method, and examples herein. The inventionshould therefore not be limited by the above described embodiments,methods, and examples, but by all embodiments and methods within thescope and spirit of the invention as claimed.

That which is claimed is:
 1. A semiconductor memory array comprising: aplurality of NAND string configurations, each said NAND stringconfiguration comprising: a plurality of semiconductor memory cellsserially connected to one another to form a string of semiconductormemory cells; a select gate drain device connected at one end of saidstring of semiconductor memory cells, wherein said select gate draindevice is not a semiconductor memory cell; and a select gate sourcedevice connected at an opposite end from said one end of said string ofsemiconductor memory cells, wherein said select gate source device isnot a semiconductor memory device; wherein at least one of saidplurality of semiconductor memory cells each comprise a substrate and afloating body region formed as part of said substrate and configured tostore data as charge therein to define a state of said semiconductormemory cell; a first region in electrical contact with said floatingbody region; a second region in electrical contact with said floatingbody region and spaced apart from said first region; and a third regionin electrical contact with said floating body region and spaced apartfrom said first and second regions; wherein said third region isconfigured to function as a collector region to maintain a charge ofsaid floating body region, thereby maintaining said state of saidfloating body region; wherein said third region is commonly connected toat least two of said semiconductor memory cells; wherein each said atleast one of said plurality of semiconductor memory cells has only onegate; wherein serial connections between at least two of saidsemiconductor memory cells are not connected to any terminals; whereinsaid select gate drain device is connected to a local bit line; and atleast one transistor isolating said local bit line from a primary bitline.
 2. The semiconductor memory array of claim 1, wherein each saidNAND string configuration is configured to perform at least one of:injecting charge into or extracting charge out of a portion of at leastone of said semiconductor memory cells to maintain a state of said atleast one of said semiconductor memory cells.
 3. The semiconductormemory array of claim 1, wherein said third region is configured toperform at least one of injecting charge into or extracting charge outof at least a portion of said floating body region.
 4. The semiconductormemory array of claim 1, wherein said floating body region is providedin a fin structure that extends vertically above said third region. 5.The semiconductor memory array of claim 1, wherein a constant voltagebias is applied to said third region.
 6. The semiconductor memory arrayof claim 1, wherein a periodic pulse of voltage is applied to said thirdregion.
 7. An integrated circuit comprising: a semiconductor memoryarray comprising: a plurality of semiconductor memory cells seriallyconnected to one another to form a string of semiconductor memory cells;a select gate drain device connected at one end of said string ofsemiconductor memory cells, wherein said select gate drain device is nota semiconductor memory cell; and a select gate source device connectedat an opposite end of said string of semiconductor memory cells, whereinsaid select gate source device is not a semiconductor memory device;wherein at least one of said plurality of semiconductor memory cellseach comprise a substrate and a floating body region formed as part ofsaid substrate and configured to store data as charge therein to definea state of said semiconductor memory cell; a first region in electricalcontact with said floating body region; a second region in electricalcontact with said floating body region and spaced apart from said firstregion; and a third region in electrical contact with said floating bodyregion and spaced apart from said first and second regions; wherein saidthird region is configured to function as a collector region to maintaina charge of said floating body region, thereby maintaining said state ofsaid semiconductor memory cell; wherein each of said at least one ofsaid plurality of semiconductor memory cells has only one gate; whereinserial connections between at least two of said semiconductor memorycells are not connected to any terminals; wherein said select gate draindevice is connected to a local bit line; at least one transistorisolating said local bit line from a primary bit line; and a controlcircuit configured to provide electrical signals to said local bit lineand said primary bit line.
 8. The integrated circuit of claim 7, whereinsaid string of semiconductor memory cells is configured to perform atleast one of: injecting charge into or extracting charge out of aportion of at least one of said semiconductor memory cells to maintain astate of said at least one semiconductor memory cell.
 9. The integratedcircuit of claim 7, wherein said third region is configured to performsaid at least one of injecting charge into or extracting charge out ofat least a portion of said floating body region.
 10. The integratedcircuit of claim 7, wherein said floating body region is provided in afin structure that extends vertically above said third region.
 11. Theintegrated circuit of claim 7, wherein a constant voltage bias isapplied to said third region.
 12. The integrated circuit of claim 7,wherein a periodic pulse of voltage is applied to said third region. 13.A semiconductor memory array comprising: a plurality of NAND stringconfigurations, each said NAND string configuration comprising: aplurality of semiconductor memory cells serially connected to oneanother to form a string of semiconductor memory cells; a select gatedrain device connected at one end of said string of semiconductor memorycells, wherein said select gate drain device is not a semiconductormemory cell; and a select gate source device connected at an oppositeend of said string of semiconductor memory cells, wherein said selectgate source device is not a semiconductor memory device; wherein atleast one of said plurality of semiconductor memory cells each comprisea substrate and a floating body region formed as part of said substrateand configured to store data as charge therein to define a state of saidsemiconductor memory cell; a first region in electrical contact withsaid floating body region; a second region in electrical contact withsaid floating body region and spaced apart from said first region; athird region in electrical contact with said floating body region andspaced apart from said first and second regions; wherein said thirdregion is configured to function as a collector region to maintain acharge of said floating body region, thereby maintaining said state ofsaid floating body region; wherein said third region is commonlyconnected to at least two of said semiconductor memory cells; whereineach said at least one of said plurality of semiconductor memory cellshas only one gate; wherein serial connections between at least two ofsaid semiconductor memory cells are not connected to any terminals;wherein said select gate source device is connected to a local sourceline; and at least one transistor isolating said local source line froma primary source line.
 14. The semiconductor memory array of claim 13,wherein each said NAND string configuration is configured to perform atleast one of: injecting charge into or extracting charge out of aportion of at least one of said semiconductor memory cells to maintain astate of said at least one semiconductor memory cell.
 15. Thesemiconductor memory array of claim 13, wherein said third region isconfigured to perform said at least one of injecting charge into orextracting charge out of at least a portion of said floating bodyregion.
 16. The semiconductor memory array of claim 13, wherein saidfloating body region is provided in a fin structure that extendsvertically above said third region.
 17. The semiconductor memory arrayof claim 13, wherein a constant voltage bias is applied to said thirdregion.
 18. The semiconductor memory array of claim 13, wherein aperiodic pulse of voltage is applied to said third region.